한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.376-377
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- 2006
Ta-N 스트레인 게이지의 제작과 그 특성
Fabrication of tantalum nitride thin film strain gauges and its characteristics
- Lee, Tae-Won (Univ. of Ulsan) ;
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Chung, Gwiy-Sang
(Univ. of Ulsan)
- 발행 : 2006.06.22
초록
This paper presents the characteristics of Ta-N thin film strain gauges that are suitable for harsh environemts, which were deposited on thermally oxidized Si substrates by DC reactive magnetronsputtering in an argon-nitrogen atmosphere (Ar-