Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
- /
- Pages.169-170
- /
- 2006
Evaluation of the fabrications and properties of ultra-thin film for memory device application
메모리소자 응용을 위한 초박막의 제작 및 특성 평가
- Jeong, Sang-Hyun (Dept. of Electronics Engineering, Cheongju Univ) ;
- Choi, Haeng-Chul (Dept. of Electronics Engineering, Cheongju Univ) ;
- Kim, Jae-Hyun (Dept. of Electronics Engineering, Cheongju Univ) ;
- Park, Sang-Jin (Division of Electronics & Information Engineering, Cheongju Univ) ;
- Kim, Kwang-Ho (Division of Electronics & Information Engineering, Cheongju Univ)
- 정상현 (청주대학교 전자공학과) ;
- 최행철 (청주대학교 전자공학과) ;
- 김재현 (청주대학교 전자공학과) ;
- 박상진 (청주대학교 전자정보공학부) ;
- 김광호 (청주대학교 전자정보공학부)
- Published : 2006.06.22
Abstract
In this study, ultra thin films of ferroelectric vinylidene fluoride-trifluoroethylene (VF2-TrFE) copolymer were fabricated on degenerated Si (n+,