한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
- /
- Pages.120-121
- /
- 2006
Ampoule-tube 법으로 P와 As을 도핑한 ZnO/Sapphire 박막의 미세구조와 전기적 특성
The Microstructures and Electrical Properties of ZnO/Sapphire Thin Films Doped by P and As based on Ampouele-tube Method
- Yoo, In-Sung (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- Jin, Eun-Mi (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- So, Byung-Moon (Iksan National Coll.) ;
- Park, Choon-Bae (Wonkwang Univ. School of Electrical Electronic and Information Engineering)
- 발행 : 2006.06.22
초록
To investigate the ZnO thin films which are interested in the next generation of short wavelength LEDs and Lasers, the ZnO thin films were deposited by RF magnetron sputtering system. Al sputtering process of ZnO thin films substrate temperature, work pressure respectively is