Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.11a
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- Pages.170-171
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- 2006
Study on the nucleophilic reaction on Orgniac Thin Films
유기물 박막에서 일어나는 친핵성 반응에 대한 연구
- Oh, Teresa (Cheongju Univ.) ;
- Kim, Hong-Bae (Cheongju Univ.)
- Published : 2006.11.09
Abstract
The chemical shift of SiOC film was observed according to the flow rate ratio. SiOC film has the broad main band of