Microstructural investigation of excimer laser-crystallized metallic thin films

  • Zhong, R. (Department of Materials Science and Engineering, University of Pittsburgh) ;
  • Wiezorek, J.M.K. (Department of Materials Science and Engineering, University of Pittsburgh) ;
  • Leonard, J.P. (Department of Materials Science and Engineering, University of Pittsburgh)
  • 발행 : 2006.08.22

초록

Recent advances in the microstructural modification of metal films using excimer laser projection irradiation and lateral resolidification are discussed. Pure copper films have been directionally resolidified into large sheet-like grains when properly encapsulated for suppression of liquid-phase dewetting. A survey and quantitative assessment of the defects found in these icrostructures, typical for rapidly solidified metals, is presented.

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