한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.1170-1173
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- 2006
Fabrication of Organic Thin-Film Transistors with Polymer Gate Insulators on Plastic Substrate
- Ahn, Seong-Deok (Electronics and Telecommunications Research Institute) ;
- Kang, Seung-Youl (Electronics and Telecommunications Research Institute) ;
- Oh, Ji-Young (Electronics and Telecommunications Research Institute) ;
- You, In-Kyu (Electronics and Telecommunications Research Institute) ;
- Kim, Gi-Heon (Electronics and Telecommunications Research Institute) ;
- Baek, Kyu-Ha (Electronics and Telecommunications Research Institute) ;
- Kim, Chul-Am (Electronics and Telecommunications Research Institute) ;
- Suh, Kyung-Soo (Electronics and Telecommunications Research Institute)
- Published : 2006.08.22
Abstract
Active layer patterned OTFT was obtained on a plastic substrate using the optimal growth condition of pentancene thin films as active layer and parylene thin films as passivation layer. Tranditional photolithography was performed to use a dry etch to pattern the material stack. The pentacene thin film and parylene thin film were deposited onto a plastic substrate using PC-OVD and CVD, respectively.
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