한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.345-348
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- 2006
Fabrication of High-Performance Piezoelectric Thick Films on Si for a Micropump of the Ink-jet Printer Head
- Kim, Jong-Min (Dept. of Digital Diplay Eng., Hoseo Univ.) ;
- Park, Hyeong-Sik (Dept. of Information & Control Eng., Hoseo Univ.) ;
- Kim, Jwa-Yeon (Dept. of Materials Science & Eng., Hoseo Univ.) ;
- Yun, Eui-Jung (Dept. of Information & Control Eng., Hoseo Univ.) ;
- Kim, Jeong-Seog (Dept. of Digital Diplay Eng., Hoseo Univ.) ;
- Cheon, Chae-Il (Dept. of Materials Science & Eng., Hoseo Univ.)
- Published : 2006.08.22
Abstract
The piezoelectric thick films were fabricated on silicon substrates by screen printing method. By developing a low-temperature sinterable piezoelectric composition and a new poling technique, we fabricated the high-performance piezoelectric thick films on silicon which can be applied for piezoelectric MEMS applications such as micropumps of the ink jet printer heads.
Keywords