Process optimization using a rule induction method based on latent variables

잠재변수에 대한 규칙추론을 통한 공정 최적화

  • 정일교 (삼성전자 반도체연구소 포토마스크팀) ;
  • 이상호 (포항공과대학교 산업경영공학과) ;
  • 전치혁 (포항공과대학교 산업경영공학과)
  • Published : 2006.11.17

Abstract

In order to determine new settings of key process variables optimally, a new rule induction method through a historical data is proposed without using an explicit functional model between process and quality variables. First, a partial least square is used to reduce the dimensionality of the process variables. Then new process settings that yield the best quality variable are identified by sequentially partitioning the reduced latent variable space using a patient rule induction method. The proposed method is illustrated with a case study obtained from steel-making processes. We also show, through simulation, that the proposed method gives more stable results than estimating an explicit function even when the form of the function is known in advance.

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