한국분말야금학회:학술대회논문집 (Proceedings of the Korean Powder Metallurgy Institute Conference)
- 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
- /
- Pages.1142-1143
- /
- 2006
The In-situ Dressing of CMP Pad Conditioners with Novel Coating Protection
초록
Kinik Company pioneered diamond pad conditioners protected by DLC barrier (