한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2006년도 춘계학술발표대회 및 제10회 신소재 심포지엄 논문개요집
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- Pages.17.1-17.1
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- 2006
Effects of Non-Prestonian Behavior of Ceria Slurry with Anionic Surfactant on Abrasive Concentration and Size in Shallow Trench Isolation Chemical Mechanical Polishing
- Choi, Hyuk-Yul (Nano SOI Process Laboratory, Hanyang University) ;
- Kang, Hyun-Goo (Nano SOI Process Laboratory, Hanyang University) ;
- Kim, Jun-Seok (Nano SOI Process Laboratory, Hanyang University) ;
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Paik, Un-Gyu
(Department of Ceramic Engineering, Hanyang University)
;
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Park, Jea-Gun
(Nano SOI Process Laboratory, Hanyang University)
- 발행 : 2006.05.19