한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2006년도 춘계학술발표대회 및 제10회 신소재 심포지엄 논문개요집
- /
- Pages.16.2-16.2
- /
- 2006
Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing
- Lee, Byong-Seog (Nano SOI Process Laboratory, Hanyang University) ;
- Kang, Hyun-Goo (Nano SOI Process Laboratory, Hanyang University) ;
- Park, Kyung-Woong (Nano SOI Process Laboratory, Hanyang University) ;
-
Paik, Un-Gyu
(Department of Ceramic Engineering, Hanyang University)
;
-
Park, Jea-Gun
(Nano SOI Process Laboratory, Hanyang University)
- 발행 : 2006.05.19