Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.05a
- /
- Pages.16.2-16.2
- /
- 2006
Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing
- Lee, Byong-Seog (Nano SOI Process Laboratory, Hanyang University) ;
- Kang, Hyun-Goo (Nano SOI Process Laboratory, Hanyang University) ;
- Park, Kyung-Woong (Nano SOI Process Laboratory, Hanyang University) ;
-
Paik, Un-Gyu
(Department of Ceramic Engineering, Hanyang University)
;
-
Park, Jea-Gun
(Nano SOI Process Laboratory, Hanyang University)
- Published : 2006.05.19
Abstract
Keywords