Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2006.05a
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- Pages.16.1-16.1
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- 2006
Effects of Amorphous-silicon and Poly-silicon films on Within-Wafer Non-Uniformity (WIWNU) Improvement in Chemical Mechanical Polishing
- Choi, Yoon-Kweon (Nano SOI Process Laboratory, Hanyang University) ;
- Choi, Jae-Il (Nano SOI Process Laboratory, Hanyang University) ;
- Park, Kyung-Woong (Nano SOI Process Laboratory, Hanyang University) ;
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Paik, Un-Gyu
(Department of Ceramic Engineering, Hanyang University)
;
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Park, Jea-Gun
(Nano SOI Process Laboratory, Hanyang University)
- Published : 2006.05.19