Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2005.05a
- /
- Pages.230-230
- /
- 2005
Effect of Boron carbide thin films with RF power by plasma enhanced chemical vapor deposition
플라즈마 기상 증착법에 의한 보론카바이드 박막의 RF 변화에 따른 효과
- Yeon, Dae-Heum ;
- Jin, Jeong-Geun ;
- Kim, Gil-Yeong ;
- Gang, Ho-Jae ;
- Park, Hyeon-Gyu ;
- Byeon, Dong-Jin
- Published : 2005.05.26
Abstract
Keywords