Optimum Design of Linear Motor by Using Taguchi Method

다구찌 기법을 이용한 선형 모터의 최적 설계

Nanometer operating linear motor is difficult to control the nano-positioning because of the vibration between structures changing of mechanical friction force happened by properties of the vibration and heat caused by operating of a mover. Therefore, it is required to analysis the vibration and heat about a mover. In this paper, we will analyze the property of vibration through analyzing by using FEM a mover of linear motor developed in the non-load situation and suggest the direction of optimal design about a mover by using method of DOE, also try to find the solution to operate the linear motor stabilized through the reducing weight of mover considering the vibration.