한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 2005년도 추계학술대회논문집
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- Pages.88-91
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- 2005
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- 1598-2548(pISSN)
축방향 하중을 이용한 마이크로 자이로스코프의 고유진동수 조율
Tuning of Micromachined Gyroscope by the Axial Loads
- 발행 : 2005.11.01
초록
Although the MEMS element is made through a very precise manufacturing process, usually there is the difference between the modeling design and the actual product. So tuning is required. Through the frequency tuning(changing the characteristics of device), we can calibrate the fabrication error and uncertainty. I'll propose the method of changing the natural frequency through the imposing the axial force on the anchor part to separate the sensing part and the tuning part. When the shape of section is the form of rectangular, the degree of the natural frequencies' change under axial force appears D be different. Applying a tuning force of 30