Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2005.11a
  • /
  • Pages.75-78
  • /
  • 2005
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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An Experimental Study on Porous Air Bearing Stiffness Characteristics

다공질 공기 베어링의 강성 특성에 관한 실험 연구

  • 정순철 (중앙대학교 기계공학부) ;
  • 이성혁 (중앙대학교 기계공학부) ;
  • 이재응 (중앙대학교 기계공학부) ;
  • 지홍규 (삼성전자 메카트로닉스 연구소) ;
  • 이동진 (삼성전자 메카트로닉스 연구소) ;
  • 류제형 (삼성전자 메카트로닉스 연구소) ;
  • 최형길 (삼성전자 메카트로닉스 연구소) ;
  • 김혁 (삼성전자 메카트로닉스 연구소)
  • Published : 2005.11.01
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Abstract

In this paper, an experimental study on porous air bearing stiffness for ultra precision positioning system was performed. In general manufacturer provide bearing stiffness under specific air pressure, but the air pressure used in the field is different. Therefore it is necessary to know the stiffness of air bearing under the pressure used in the field. In order to know that, experimental device which can realize actual operating conditions was made. Using this device, static and dynamic stiffness of air bearing can be obtained. As a result, displacement error occurred around 1 $\mu$m at recommended load.

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