한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 춘계학술대회 논문집 디스플레이 광소자 분야
- /
- Pages.69-71
- /
- 2005
기판온도 변화에 따른 디스플레이 하부 전극용 AZO 박막의 제작
Preparation of AZO thin film using bottom electrode of display with substrate temperature
- Kim, Kyung-Hwan (Kyungwon Uni.) ;
- Cho, Bum-Jin (Kyungwon Uni.) ;
- Keum, Min-Jong (Kyungwon Uni.) ;
- Son, In-Hwan (Shinsung college.)
- 발행 : 2005.05.13
초록
In this study, Al doped ZnO(AZO)thin film were prepared on glass substrates by FTS(Facing targets Sputtering) system. We investigated electrical.. optical and structural properties of AZO thin film under the substrate temperature of the R.T.