한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
- /
- Pages.585-586
- /
- 2005
스퍼터링 법에 의한 BSCCO 단결정 성장의 부착 계수 향상
Enhanced sticking coefficient in the BSCCO single crystal grown by the sputtering method
- Cheon, Min-Woo (DongShin Univ.) ;
-
Yang, Sung-Ho
(DongShin Univ.) ;
- Park, Yong-Pil (DongShin Univ.)
- 발행 : 2005.07.07
초록
BSCCO thin films were fabricated by an ion beam sputtering method with an ultra-low growth rate, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BSCCO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about