한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.432-433
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- 2005
기판온도 및 후 열처리에 따른 AZO(ZnO:Al) 박막의 특징
Characteristics of AZO(ZnO:Al) thin film with the substrate temperature and post-annealing
- Kim, Kyung-Hwan (Kyungwon University) ;
- Cho, Bum-Jin (Kyungwon University) ;
- Keum, Min-Jong (Kyungwon University) ;
- Son, In-Hwan (Shinsung college) ;
- Choi, Hyung-Wook (Kyungwon University) ;
- Choi, Myung-Kyu (Kyungwon college)
- 발행 : 2005.07.07
초록
In this study, Al doped ZnO(AZO) thin film were prepared on glass substrates by FTS(Facing Targets Sputtering) system. We investigated electrical, optical and structural properties of AZO thin film with the substrate temperature of the R.T,