한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
- /
- Pages.143-144
- /
- 2005
$RuO_2$ 전극 위에 증착된 ALD-$Al_2O_3$ MIM 커패시터 특성
Characteristics of ALD-$Al_2O_3$ MIM Capacitor on $RuO_2$ Metal Electrode
- Do, Seung-Woo (Kyungpook National Univ.) ;
- Mun, Kyung-Ho (Kyungpook National Univ.) ;
- Jang, Cheol-Yeong (Kyungpook National Univ.) ;
-
Jung, Young-Chul
(Kyongju Univ.) ;
- Lee, Jae-Sung (Uiduk Univ.) ;
-
Lee, Yong-Hyun
(Kyungpook National Univ.)
- 발행 : 2005.07.07
초록
Recently, MIM(metal-insulator-metal) capacitor is one of the essential device for DRAM device. In this thesis,