한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.141-142
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- 2005
Ampoule-tube 법을 이용한 P와 As 도핑 p형 ZnO 박막의 미세구조와 Hall 특성
Microstructures and Hall Properties of p-type Zno Thin Films with Ampouele-tube Method of P and As
- So, Soon-Jin (Knowledge*On Inc.) ;
- Lim, Keun-Young (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
- Yoo, In-Sung (Wonkwang Univ. School of Electrical Electronic and Information Engineering) ;
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Park, Choon-Bae
(Wonkwang Univ. School of Electrical Electronic and Information Engineering)
- 발행 : 2005.07.07
초록
To investigate the ZnO thin films which is interested in the next generation of short wavelength LEDs and Lasers, our ZnO thin films were deposited by RF sputtering system. At sputtering process of ZnO thin films, substrate temperature, work pressure respectively is