한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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- Pages.109-110
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- 2005
CdS 박막의 구조적, 광학적 특성에 미치는 스퍼터 전력 효과
Effects of Sputter Power on the Structural and Optical Properties of CdS Thin Films
- Lee, Jae-Hyeong (Kunsan National Univ.) ;
- Choi, Sung-Hun (Kunsan National Univ.) ;
- Jung, Hak-Kee (Kunsan National Univ.) ;
- Lee, Jong-In (Kunsan National Univ.) ;
- Lim, Dong-Gun (Chungju National Univ.) ;
- Yang, Kea-Joon (Chungju National Univ.)
- 발행 : 2005.07.07
초록
Cadmium sulphide (CdS) films have been prepared on polycarbonate (PC), polyethylene terephthalate (PET), and Coming 7059 substrates by r.f. magnetron sputtering technique at room temperature. A comparison of the properties of the films deposited on polymer and glass substrates was performed. In addition, the influence of the sputter power on the structural and optical properties of these films was evaluated.