한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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- Pages.126-127
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- 2005
반도체 탄소나노튜브의 산화열처리 효과
The Oxidation Effect of Semiconductor Carbon Nanotube
- Kim, Jwa-Yeon (Hoseo Univ.) ;
- Park, Kyung-Soon (Sejong Univ.)
- 발행 : 2005.11.10
초록
Semiconductor carbon nanotube was grown on oxided silicon wafer with Atmosphere Pressure Chemical Vapor Deposition (APCVD) ethmod and investigated the electrical property after thermal oxidation at 300