Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.126-127
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- 2005
The Oxidation Effect of Semiconductor Carbon Nanotube
반도체 탄소나노튜브의 산화열처리 효과
- Kim, Jwa-Yeon (Hoseo Univ.) ;
- Park, Kyung-Soon (Sejong Univ.)
- Published : 2005.11.10
Abstract
Semiconductor carbon nanotube was grown on oxided silicon wafer with Atmosphere Pressure Chemical Vapor Deposition (APCVD) ethmod and investigated the electrical property after thermal oxidation at 300