한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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- Pages.124-125
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- 2005
$BCl_3/Ar$ 고밀도 플라즈마를 이용한 ZnS:Mn 박막의 식각 특성
Etching characteristics of ZnS:Mn thin films using $BCl_3/Ar$ high density plasma
- Kim, Gwan-Ha (Chungang Univ.) ;
- Kim, Chang-Il (Chungang Univ.) ;
- Lee, Cheol-In (Ansan College of Technology) ;
- Kim, Tae-Hyung (Yeojoo Institute of Technology)
- 발행 : 2005.11.10
초록
ZnS:Mn thin films have attracted great interest as electroluminescence devices. In this study, inductively coupled BCl