한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
- /
- Pages.63-64
- /
- 2005
스퍼터 증착된 CdS 박막의 $CdCl_2$ 를 이용한 열처리 효과
Effects of $CdCl_2$ Heat Treatment on the Properties of Sputter Deposited CdS Films
-
Lee, Jae-Hyeong
(Kunsan National Univ.) ;
- Choi, Sung-Hun (Kunsan National Univ.) ;
- Lee, Dong-Jin (Kunsan National Univ.) ;
-
Jung, Hak-Kee
(Kunsan National Univ.) ;
-
Lim, Dong-Gun
(Chungju National Univ.) ;
- Yang, Kea-Joon (Chungju National Univ.)
- 발행 : 2005.11.10
초록
CdS thin films were fabricated by rf magnetron sputter technique, and annealed in tube furnace using vacuum evaporated