Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.63-64
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- 2005
Effects of $CdCl_2$ Heat Treatment on the Properties of Sputter Deposited CdS Films
스퍼터 증착된 CdS 박막의 $CdCl_2$ 를 이용한 열처리 효과
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Lee, Jae-Hyeong
(Kunsan National Univ.) ;
- Choi, Sung-Hun (Kunsan National Univ.) ;
- Lee, Dong-Jin (Kunsan National Univ.) ;
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Jung, Hak-Kee
(Kunsan National Univ.) ;
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Lim, Dong-Gun
(Chungju National Univ.) ;
- Yang, Kea-Joon (Chungju National Univ.)
- Published : 2005.11.10
Abstract
CdS thin films were fabricated by rf magnetron sputter technique, and annealed in tube furnace using vacuum evaporated