Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.49-50
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- 2005
Investigation on the Electrical Properties of Ion Implanted ZnO Thin Film
이온 주입된 ZnO 박막의 전기적 특성 연구
- Kang, Hong-Seong (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Lim, Sung-Hoon (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Chang, Hyun-Woo (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Kim, Gun-Hee (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Kim, Jong-Hoon (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Lee, Sang-Yeol (Dept. of Electrical and Electronic Engineering, Yonsei University) ;
- Lee, Jung-Kun (Materials Science and Technology Division, Los Alamos National Laboratory) ;
- Nastasi, Michael (Materials Science and Technology Division, Los Alamos National Laboratory)
- Published : 2005.11.10
Abstract
Nitrogen and phosphorus ions were implanted into ZnO thin film fabricated by pulsed laser deposition. ion implanted ZnO thin films were annealed from