Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
- /
- Pages.41-42
- /
- 2005
Structural and Electrical properties of Piezoelectric ZnO Films Grown by Pulsed Laser Deposition for Film Bulk Acoustic Resonator
마이크로파 통신소자용 ZnO 압전 박막의 구조적 전기적 특성
- Kim, Gun-Hee (Yonsei Univ.) ;
- Kang, Hong-Seong (Yonsei Univ.) ;
- Ahn, Byung-Du (Yonsei Univ.) ;
- Lim, Sung-Hoon (Yonsei Univ.) ;
- Chang, Hyun-Woo (Yonsei Univ.) ;
- Lee, Sang-Yeol (Yonsei Univ.)
- Published : 2005.11.10
Abstract
The characteristics of ZnO films are reported depending on different deposition conditions for film bulk acoustic resonators (FBARs). The ZnO films have been deposited on Al films evaporated on p-type (100) silicon substrate by pulsed laser deposition (PLD) technique using a Nd:YAG laser. These films exhibit an electrical resistivity higher than