Electron Beam Projection Nanopatterning using Crystalline Lattice Image

  • Kim, Ki-Bum (School of Materials Science and Engineering, Seoul National University) ;
  • Kim, Byung-Sung (School of Materials Science and Engineering, Seoul National University) ;
  • Lee, Hyo-Sung (School of Materials Science and Engineering, Seoul National University) ;
  • Wi, Jung-Sub (School of Materials Science and Engineering, Seoul National University) ;
  • Jin, Kyung-Bae (School of Materials Science and Engineering, Seoul National University) ;
  • Kim, Hyun-Mi (School of Materials Science and Engineering, Seoul National University)
  • Published : 2005.05.01