Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Electrical and Optical of Properties ITO Thin Film by CMP Process Parameter

CMP 공정변수에 따른 ITO박막의 전기적.광학적 특성

  • 최권우 (조선대학교 전기공학과) ;
  • 김남훈 (조선대학교 에너지자원신기술연구소) ;
  • 서용진 (대불대학교 전기공학과) ;
  • 이우선 (조선대학교 전기공학과)
  • Published : 2005.11.04
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Abstract

Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) by the change of process parameters for the improvement of electrical and optical properties of ITO thin film. Light transparent efficiency of ITO thin film was improved after CMP process at the optimized process parameters compared to that before CMP process.

Keywords