Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Electrical and Optical of Properties ITO Thin Film with a Control of Temperature in Pad Conditioning Process

CMP 패드 컨디셔닝 온도조절시 ITO박막의 전기적.광학적 특성 거동

  • 최권우 (조선대학교 전기공학과) ;
  • 김남훈 (조선대학교 신기술 에너지 자원 연구소) ;
  • 서용진 (대불대학교 전기공학과) ;
  • 이우선 (조선대학교 전기공학과)
  • Published : 2005.11.04
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Abstract

Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) immediately after pad conditioning with the various conditioning temperatures by control of de-ionized water (DIW). Light transparent efficiency of ITO thin film was improved after CMP process after pad conditioning at the high temperature because the surface morphology was smoother by soften polishing pad and decreased particle size.

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