Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Analyses on the Properties of $SiO_2$ Thin Films using Sol-Gel Method

솔젤법에 의해 제작된 $SiO_2$ 박막 특성 분석

  • You, Do-Hyun (Dept. of Electrical Engineering, Ansan College of Technology)
  • Published : 2005.11.04
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Abstract

$SiO_2$ thin films are fabricated using sol-gel method and dipping method. Relative dielectric constant of thin films decreases a little according to increasing the measuring frequency. Tan ${\delta}$ of thin films increases a little below 100kHz and it increases rapidly over 100kHz.

Keywords