Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A study on Multi Mass System for MEMS vibratory Gyroscope

MEMS공진형 자이로스코프 응용을 위한 다중질량시스템에 관한 연구

  • Hwang, Young-Seok (School of Electrical Engindfasdfeering and Computer Science, Seoul National University) ;
  • Jeon, Seung-Hoon (Electronic system Development Team, Automative Electronics R&D Center, Research and Development Division for Hyundai Company and Kia Motors Corporation) ;
  • Jung, Hyoung-Kyoon (School of Electrical Engindfasdfeering and Computer Science, Seoul National University) ;
  • Lee, June-Young (School of Electrical Engindfasdfeering and Computer Science, Seoul National University) ;
  • Chang, Hyun-Kee (Intellimicrons CO.,LTd) ;
  • Kim, Yong-Kweon (School of Electrical Engindfasdfeering and Computer Science, Seoul National University)
  • 황영석 (서울대학교 전기 컴퓨터 공학부) ;
  • 전승훈 (현대 기아 모터스 연구개발본부) ;
  • 정형균 (서울대학교 전기 컴퓨터 공학부) ;
  • 이준영 (서울대학교 전기 컴퓨터 공학부) ;
  • 장현기 (인텔리마이크론즈) ;
  • 김용권 (서울대학교 전기 컴퓨터 공학부)
  • Published : 2005.11.04
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Abstract

In this paper, a two-mass system for SiOG (Silicon on Glass) vibratory gyroscope with the need of frequency tuning was proposed to increase the stability of the device with wide bandwidth. Air damping and bandwidth were analyzed using MATLAB. The measured resonance frequency is 5.2 kHz, which is 7 kHz in the design. But the measured bandwidth is 450 Hz, similar to the designed bandwidth with 500 Hz. Also the frequency difference (210 Hz) between the driving and sensing part is smaller than the wide bandwidth of two mass system.

Keywords