Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.164-164
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- 2004
AFM lithography for fabricating nano scale structures
- Ham, Chul-Young (Dpet. of Nano Science and Technology, University of Seoul) ;
- Han, Hee-Soo (Dpet. of Nano Science and Technology, University of Seoul) ;
- Jun, Sung-Ho (Dpet. of Nano Science and Technology, University of Seoul) ;
- Ko, Chang-Hun (Dept. of Physics, University of Seoul) ;
-
Han, Moon-Sup
(Dept. of Physics, University of Seoul)
;
- Park, Kyoung-Wan (Dpet. of Nano Science and Technology, University of Seoul)
- Published : 2004.08.19
Abstract
Keywords