대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2004년도 춘계학술대회
- /
- Pages.1136-1141
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- 2004
전해 가공 방법을 이용한 다중 마이크로 전극 제작
Electrochemical Fabrication of Multi Microelectrodes
- Kwon, Soon-Geun (KAIST) ;
-
Lim, Hyung-Jun
;
-
Kim, Soo-Hyun
(KAIST) ;
-
Kwak, Yoon-Keun
(KAIST)
- 발행 : 2004.04.28
초록
In recent years, demands on microelectrode have been greatly enhanced because of its potential applications and mass production of microelectrodes is needed. An electrochemical fabrication is used as an method for the simple and cheap fabrication of multi microelectrodes. In this paper, one dimensional microelectrode array is used for fabricating of multi electrodes. A diffusion layer which is formed near the electrode surface has an effect on the shape error of multi microelectrodes. The optimal distance between electrodes to minimize shape errors of multi electrodes is investigated. Multi microelectrodes which has several tens of and hundreds of micrometer in diameter are fabricated at a time.