Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.04b
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- Pages.125-128
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- 2004
Fabrication of SiCN Microstructures for Super-Temperature MEMS applications
초고온 MEMS용 SiCN 미세구조물 제조
- Woo, Hyung-Soon (Dongseo Univ) ;
- Kim, Gue-Hyun (Dongseo Univ) ;
- Noh, Sang-Su (Technical Research Institute, Daeyang Electric Co., LTD) ;
- Chung, Gwiy-Sang (Dongseo Univ)
- Published : 2004.04.24
Abstract
In this paper, a novel processing technique for fabrication of high-temperature MEMS based on polymer-derived SiCN microstructures is described. PDMS molds are fabricated on SU-8 photoresist using standard UV-photolithographic processes. Liquid precursors are injected into the PDMS mold. And then, the resulting solid polymer structures are crosslinked under isostatic pressure, and pyrolyzed to form a ceramic capable of withstanding over