Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.11a
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- Pages.675-678
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- 2004
Evaluation of Ozone for Metal Oxide Thin Film Fabrication
- Lim, Jung-Kwan (Dongshin Univ.) ;
- Park, Yong-Pil (Dongshin Univ.) ;
- Jang, Kyung-Uk (Kyungwon Coll.) ;
- Lee, Hee-Kab (KCCI)
- Published : 2004.11.11
Abstract
Ozone is usually generated from oxygen gas using a silent discharge apparatus and its concentration is less then 10 mol%. An ozone condensation system is constructed for metal oxide thin film fabrication. Ozone is condensed by the adsorption method, which is widely used for the growth of oxidation thin films such as superconductor. Highly condensed ozone is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is most effective in the highly condensed ozone region and its method is superior to Q-mass analyzer for determining ozone concentration because of the simplicity of the method.
Keywords
- ozone condensation;
- absolute ozone concentration;
- thermal decomposition method;
- Q-mass analyzing method