한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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- Pages.29-32
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- 2004
유도결합 플라즈마를 이용한 BST 박막의 식각 특성 및 모델링
Etching characteristics and modeling of BST thin films using inductively coupled plasma
- Kim, Gwan-Ha (ChungAng Uni.) ;
- Kim, Kyoung-Tae (ChungAng Uni.) ;
- Kim, Dong-Pyo (KDG Eng.) ;
- Lee, Cheol-In (Ansan College of Tech.) ;
- Kim, Tae-Hyung (YeoJoo Institute of College) ;
- Kim, Chang-Il (ChungAng Uni.)
- 발행 : 2004.11.11
초록
This work was devoted to an investigation of etching mechanisms for