한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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- Pages.421-424
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- 2004
얇은 게이트 산화막 $30{\AA}$ 에 대한 박막특성 개선 연구
A study on Improvement of $30{\AA}$ Ultra Thin Gate Oxide Quality
초록
As the deep sub-micron devices are recently integrated high package density, novel process method for sub