한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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- Pages.417-420
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- 2004
n형 GaN의 doping 농도에 따르는 건식 식각 손상
Doping-level dependent dry-etch damage of in n-type GaN
- 이지면 (국립순천대학교, 신소재응용공학부, 재료금속공학)
- Lee, Ji-Myon (Dept. of Materials Science and Metallurgical Engineering, Sunchon National University)
- 발행 : 2004.07.05
초록
The electrical effects of dry-etch on n-type GaN by an inductively coupled