Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07a
- /
- Pages.357-360
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- 2004
A study on properties of ZnO:Al films on PC substrate for solar cell applications
태양전지 응용을 위한 PC 기판상의 ZnO:Al 박막 특성에 관한 연구
- Na, Young-Il (Kunsan National Uni.) ;
- Kim, Young-Dong (Kunsan National Uni.) ;
-
Lee, Jae-Heong
(Kunsan National Uni.)
;
-
Jung, Hak-Kee
(Kunsan National Uni.)
;
-
Lee, Jong-In
(Kunsan National Uni.)
;
-
Lim, Dong-Gun
(Chungju National Uni.)
;
- Yang, Kea-Joon (Chungju National Uni.)
- Published : 2004.07.05
Abstract
Al doped ZnO thin films have been were properties of excellent optical transmittance, low resistivity and wide bandgap where be widely used transparent electrode on solar cell. In this paper, ZnO:Al thin films on PC substrate were prepared by RF magnetron sputtering method using ceramic taget with diffrent deposition conditions. In addition, the electrical, structural, optical properties were investigated. we investigated sample properties of Sputter powers and pressures change in