Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07a
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- Pages.200-202
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- 2004
Investigation on formation mechanism of ZnO thin films deposited by pulsed laser deposition depending on plume-substrate angles
펄스 레이저 증착법에서 증착 각도 변화에 따른 ZnO 박막 형성 메카니즘
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Kim, Jae-Won
(Yonsei University) ;
- Kang, Hong-Seong (Yonsei University) ;
- Lee, Sang-Yeol (Yonsei University)
- Published : 2004.07.05
Abstract
ZnO thin films were grown at different plume-substrate angles by pulsed laser deposition(PLD). From the X-ray diffraction(XRD) result, all ZnO thin films were found to be well c-axis oriented and c-axis lattice constant approached the value of bulk ZnO as plume-substrate(P-S) angle decreased. The grain size of ZnO thin films measured by atomic force microscopy increased and the UV intensity of ZnO thin films investigated by photoluminescence increased as P-S angle decreased. It is found that the improvement of structural and optical properties mainly comes from the reduction of the flux of ablated species arriving on a substrate per a laser shot by tilting a substrate parallel to the plume propagation direction.