Kinematic calibration for parallel micro machine platform

마이크로 병렬기구 플랫폼의 기구학적 보정

This paper describes the mechanism of parallel micro machine platform and its feedback control system for acquiring high accuracy. The parallel micro machine platform that has developed has 5x5x5 work-space and sub-micron accuracy. For the high accuracy, the feedback control system is important but errors in machining and assembling are inevitable. Kinematic calibration is important for this reason. In this paper, various error components are introduced and the effects of error component are analyzed.