• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1453-1459
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• 2012

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage will exacerbate the positioning accuracy. This paper presents an approach to model the dual stage system by using bond graph theory. And the state space equations can be derived through the bond graph straightforwardly, which can be used in computing simulations. Through designing the compensators for the dual stage system and simulating, the dual stage performs better dynamics characteristic than the single actuator system.

• Journal of Environmental Science International
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• v.23 no.4
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• pp.737-742
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• 2014

This study aimed for evaluating the applicability of the two stage dual media filtration system in field water treatment plant. The field plant of two stage and dual media filtration system was operated for 2 months. Average iron concentrations of the settled water, existing filtered water and second stage filtered water was 0.041 mg/L, 0.007 mg/L and 0.005 mg/L, respectively. Removal efficiency of iron concentration in the second stage is appropriately 35% more than in existing filtered water. Also removal efficiency of residual chlorine in the dual media filtration system is relatively 42.3% more than in existing filtered water due to adsorption of activated carbon, but the removal of ammonia nitrogen by adsorption is insufficient. Average concentrations of THM and chloroform in the settled water are 0.033 mg/L, 0.026 mg/L, respectively and in existing filtered water are 0.023 mg/L and 0.023 mg/L. Average concentrations of THM and chloroform in the dual media filtration system are 0.008 mg/L and 0.013 mg/L. Therefore removal efficiency of THM concentration in second stage is more than 66.4% in existing filtrated water. Also removal efficiency of chloroform in the dual media filtration system is more than 50.0% in existing filtered water because of the adsorption of activated carbon. In this case backwashing period in dual stage system is 4~5 days, but in existing filtration system is 1~2 days.

• 제어로봇시스템학회:학술대회논문집
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• 1999.10a
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• pp.317-320
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• 1999

A robust end time optimal conかof strategy for dual-stage servo system is presented. The time optimal trajectory for a mass-damper system is determined and given os a reference input to the servo system. The feedback controller is constructed so that the fine stage tracks the coarse stage errors and robustly designed as the“perturbation compensated sliding mode control(PCSMC)”law, a combination of slid-ing mode controller(SMC) and perturbation observer(PO). In addition, a null motion controller which regulates the fine stage at its neutral position is designed based on the“dynamic consistency”So, the overall dual-stage servo system exhibits the robust and time-optimal performance. The inherent merit and performance of the dual-stage system will be shown.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.237-242
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• 2000

The areal recording density of HDD(Hard Disk Drive) has been increasing by about 60% a year. In order to achieve high areal density, less track pitch is expected and more servo bandwidth is required. Dual stage actuator and servo controller for HDD have been suggested for achieving high track density as a possible solution. Dual-loop servo system is generally classified into a two-input-two-output system, but if we use an estimator for a two-input-two-output system, it can be converted into two input one output system. Since we can't control the dual stage servo system by the classical method, it requires a special technique; for example, Parallel Loop System, Master-Slave Loop System, Decoupled Master-Slave Loop System, and Dual Feedback Loop System. In this paper, we performed experimental evaluations of several types of control algorithm. Further experiments will be made in the future.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.86-94
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• 2007

In this paper, a dual stage servo mechanism has been developed for image tracking system to improve control performances such as small rise time, small overshoot, small settling time, small stabilization error etc. A secondary stage, a platform, actuated by a pair of electro-magnets is mounted on a conventional elevation gimbal. In this mechanism, the gimbal provides large range but slow motion and the platform provides small range but fast positioning. A sliding mode control is applied to the platform positioning to attain robust performances and stability in the presence of the disturbance related to dynamic coupling of the gimbal and the platform. Results from experiments illustrate that the suggested dual stage mechanism controlled by the sliding mode control is effective in improving responses and attenuating the disturbance response related with dynamic coupling.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.4
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• pp.277-283
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• 2003

Recently, near-field recording (NFR) disk drive schemes have been proposed with a view to increasing recording densities of hard disk drives. Compared with hard disk drives. NFR disk drives have narrower track pitches and are exposed to more severe periodic disturbances resulting from eccentric rotation of the disk. It is difficult to meet servo system design specifications for NFR disk drives with conventional VCM actuators in that the servo system for an NFR disk drive generally requires a feater gain and higher bandwidth. To tackle the problem various dual-stage actuator systems composed of a microactuator mounted on top of a conventional VCM actuator have been proposed. This article deals with the problem of designing a tracking servo system far an NFR disk drive adopting a dual-stage actuator. We summarize design constraints pertaining to the dual-stage servo system and present a new servo scheme using iterative teaming control. We design feedback compensators and an iterative teaming controller for a target plant and verify the validity of the proposed control scheme through a computer simulation.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.