Development of Surface Acoustic Wave Biosensor Using Epitaxial Lift-Off(ELO) Technology

ELO 기술을 이용한 표면 탄성파 바이오 센서의 개발

  • 김기범 (전북대학교 생체정보공학부) ;
  • 정우석 (전북대학교 대학원 의용생체공학과) ;
  • 권대규 (전북대학교 생체정보공학부) ;
  • 김남균 (전북대학교 생체정보공학부) ;
  • 홍철운 (전북대학교 생체정보공학부)
  • Published : 2004.10.01

Abstract

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

Keywords