4채널 원통형 정전용량 변위센서의 자동ㆍ정밀 검보정

Automatic and precise calibration of 4-channel cylindrical capacitive displacement sensor

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.