대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
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- Pages.477-480
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- 2004
공진주파수 스펙트럼법을 이용한 압전박막의 특성 평가
Evaluating Piezoelectric Thin Film Characteristics Using Resonance Spectrum Method
- Choi Joon Young (Dept. of Electric & Electrical Engineering, Inha University) ;
- Chang Dong Hoon (Dept. of Electric & Electrical Engineering, Inha University) ;
- Kang Seong Jun (Dept. of Semiconductor Materials & Devices, Yosu National University) ;
- Yoon Yung Sup (Dept. of Electric & Electrical Engineering, Inha University)
- 발행 : 2004.06.01
초록
We studied the characteristics of impedance and electromechanical coupling coefficient in ZnO and AIN thin films by using resonance frequency spectrum method. The response peak of impedance decreased with the decrease of thickness of piezoelectrics, the number of mode of response peak increased with the increase of substrate thickness. An error of
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