Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Crystal Structure Refinement of $SnO_{2}$ Thin Film Using X-ray Scattering

X-선 산란을 이용한$SnO_{2}$ 박막의 결정구조 정밀화

  • 김용일 (한국표준과학 연구원, 물질량표준부) ;
  • 남승훈 (한국표준과학 연구원, 환경안전계측 센터) ;
  • 박종서 (한국표준과학 연구원, 환경안전계측 센터)
  • Published : 2003.11.05
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Abstract

The precise structural analysis of $SnO_{2}$ thin film, which was prepared by PECVD and thickness 2400 ${\AA}$, was tried to do the structural refinement using X -ray diffraction data. The observed diffraction patterns of $SnO_{2}$ thin film had the strongly preferred orientation effect. WIMV method was used to correct the preferred orientation effect. The final weighted R-factor, $R_{WD}$ was 7.92 %. The lattice parameters, a = b == 4.7366(1) ${\AA}$ and c = 3.1937(1) ${\AA}$, were almost in accordance with ones of $SnO_{2}$ powder.

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